The article describes the role of reduced order models (ROM) in MEMS design & testing, reflects their advantages in comparison with the finite element method (FEM) full models for real-time behavioral modeling of MEMS dynamic characteristics and versatile research of the objects' properties. The mathematical interpretation of the procedure for reducing the system dynamics equations order by switching from the full model presented in the form of state variables equations to the ROM state variables equations is given, the four existing scientific methods for reducing the FEM model order are presented in generalized form. The particularities of embedded ANSYS software capabilities application to automatically generate the ROM from the original full FEM model with lower computer power requirements and the preservation of the original model accuracy in the presence of only the structural mechanics are set out in details. Two equal algorithms for further work with the ROM in MatLab software in order to simulate the MEMS dynamics and study time and frequency properties of the model are presented: by designing the scheme consisting of prearranged Simulink function blocks and by writing an M-file program listing using the special MatLab programming language. Scientific novelty of the results is the combination of the methods for MEMS design (system of partial differential equations, ANSYS program) and behavioral modeling (system of ordinary differential equations, MatLab program) that can significantly reduce the complexity of the FEM model adaptation to the real-time modeling and eliminate computation errors.

Keywords: micro-electro-mechanical system, finite element method, behavioral modeling, reduced order model, ANSYS, MatLab

The work is devoted to the synthesis of a linear acceleration sensor with two axes of sensitivity behavioral model based on the mathematical model of this device in the differential equations form using MatLab software package Simulink environment. The results of the dynamics simulation of the synthesized behavioral sensor model in the form of transient and spectral analysis of the system reaction are shown. The main idea of analysis is to study the frequency parameters and damping properties of the object. The experiment has identified high quality factor of the oscillatory system, due to small damping, it is reflected by the slow decay of transient and pronounced resonances.

Keywords: microsystem technology, microelectromechanical systems, electronic components, accelerometer, sensor, design, model, modeling, transient, spectral analysis

The work is devoted to the synthesis of a angular rate sensor behavioral model based on the mathematical model of this device in the differential equations form using MatLab software package Simulink environment. The results of the dynamics simulation of the synthesized behavioral sensor model in the form of transient and spectral analysis of the system reaction are shown. The main idea of analysis is to study the frequency parameters and damping properties of the object. The experiment has identified high quality factor of the oscillatory system, due to small damping, it is reflected by the slow decay of transient and pronounced resonances.

Keywords: microsystem technology, microelectromechanical systems, electronic components, gyroscope, electrostatics, design, model, modeling, transient, spectral analysis