The method of calculating the effect of thermal stress on the dynamic characteristics of inertial microelectromechanical systems (MEMS) is presented in this article. Testing was conducted on a technique of vibrating gyroscope LL type electrostatic actuator in a temperature range from -40 to 80 ° C. It is shown that the thermoelastic stresses lead to a shift in the natural oscillation frequencies and the change of amplitude-frequency characteristics of the system. Method of calculation is based on the sequential solution of differential equations of heat conduction and the generalized Hooke's law, taking into account thermal stresses. Modal analysis and construction of MEMS amplitude-frequency characteristics is performed considering prestressed calculated in the previous step.

Keywords: microelectromechanical systems, micromechanical gyroscope, thermoelastic stresses, temperature errors, numerical simulation, frequency response