Electron beam surface modification of multi-component glasses for microsystems
Abstract
Electron beam surface modification of multi-component glasses for microsystems
Incoming article date: 16.03.2018The questions of desorption of the elemental composition of glass during processing with an electron beam is discussed. Sample silicate glasses prepared by standard technology were studied after polishing by electron beam processing (EBP). Calculated estimates showed that the depth of the surface depletion layer of weakly alkaline elements reaches 20-50 nm. Herewith the temperature front reaches the machining depth of 50 µm.
Keywords: electron-beam, glass, diffusion, desorption, microsystems